300mm of X & Y motion
Loads up to 75 kg
0.1, 0.5 & 1 micron resolution linear encoders
Single or dual linear motors per axis
Straight, flat motion ideal for inspection
Open frame configuration allows access to top and bottom of payload
Clean, compact design; the POF115 utilizes an advanced cable management system that combines all signals into two cables extending from the bottom axis.
Class 10 cleanroom option

POF115

Primatics POF115 Series open frame X, Y stages are ideal for precision inspection and assembly applications. With its large central aperture, it affords top and bottom access to the payload.

Precision Grade Performance Specs	POF115-300 Single Side Drive	POF115-300 Dual Side Drive
Travel (mm)	300 x 300
Life at Listed Specification x 50 km	100
Positional Accuracy w/ Linear Encoder (microns)	+/- 15	+/- 10
Error Mapped Accuracy w/ E4 Linear Encoder (microns)	+/- 1.5	+/- 1.0
Positional Repeatability w/ Linear Encoder (1, 0.5, 0.1 micron resolution)	+/- 2, +/- 1.5, +/- 0.75	+/-1, +/- 0.75, +/- 0.5
Straightness of Travel (microns) over Total Table Travel	+/- 5
Flatness of Travel (microns) over Total Table Travel	+/- 5
Max Speed (mm/s)²	300
Direct Loading Capacity (kg)	50	75
Minimum Resolution w/ Linear Encoder (microns)	0.1
Orthogonality (arc-sec)	15
Weight (kg)	30	40

Higher Performance

Open frame stages are most often used in applications requiring very accurate, flat motion. To achieve these requirements, the POF115 eliminates all empty space between the top and bottom of the positioner, minimizing the overall height & tolerance stack without sacrificing stiffness & load capacity. It utilizes precision linear guide bearings ideal for fast, repetitive motion, and a dual linear encoder option ensures reduced abbe errors.

Cleaner Design

Our unique Prima-Flex cable management system eliminates the necessity of external cable carriers on the POF115. All signals for both axes are terminated into two high flex cables that exit one corner at the bottom of the stage.