PRECISE VACUUM MOTION
Precise motion in a vacuum is absolutely necessary for a number of applications, including medical applications, analytical applications, and semiconductor equipment applications—components and materials must be carefully selected for vacuum compatibility to prevent outgassing of unwanted compounds. Additionally, designs and assembly processes must eliminate sources of contaminants. Even packaging the finished product must be engineered to assure integrity of the vacuum preparation.
HIGH-PERFORMANCE, ULTRA-HIGH VACUUM LINEAR STAGE
At Primatics, we deliver a high-performance, ultra-high vacuum linear stage, using special NSK E-DFO coated linear elements for Reflective X Ray Optics’ sputtering systems. Primatics is a manufacturer and worldwide supplier of vacuum and cleanroom compatible motion equipment.
This XY stage operates in ultrahigh vacuum—it has been configured with stationary motors to eliminate moving wires and provide a thermally conductive path to the mounting surface. Additionally, this stage has a uniquely designed sealing procedure for the servo motor stators.
CUSTOM ROTARY AXIS
This custom rotary axis—with a high resolution encoder and customer specified servo drive— is used in a semiconductor machine for rotating wafers.
This XYZ mechanism—with a lead screw drive train and stepper motors—has a very unique configuration, including an internal post that moved in a slot to guarantee the motion path. The initial prototypes were delivered to the client in three weeks.